Vacuum Equipment

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Vacuum Equipment

AEC has been dedicated to sales and customer support of  the high-technical, high-reliable vacuum manufacturing equipment. We have the best service team and full technical support to meet customers' expectation.

Our handling products are :

  1. SHI/NAGASE : Cryopump, cryo-refrigerator labo system.
  2. Rf generator, matching box, plasma asher , and plasma cleaner.
  3. Mask picker